Оптико-электронные методы автоматизированного контроля топологии изделий микроэлектроники / Е.К. Чехович ; АН БССР. Ин-т электроники.
Material type:
- 5343000878
Item type | Current library | Collection | Call number | Status | Notes | Barcode | |
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Fundamental Scientific Library | General | РII/603463 (Browse shelf(Opens below)) | Available | 30 Days Loan | 120603463 | |
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Fundamental Scientific Library | General | РII/603804 (Browse shelf(Opens below)) | Available | 30 Days Loan | 120603804 |
Библиогр.: с. 200-211
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