Плазмохимическое и ионно-химическое травление микроструктур / В.Ю. Киреев, Б.С. Данилин, В.И. Кузнецов.
Material type:
Item type | Current library | Collection | Call number | Status | Notes | Barcode | |
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Fundamental Scientific Library | General | PII/503212 (Browse shelf(Opens below)) | Available | 30 Days Loan | FL0228989 |
Библиогр.: с. 121 - 125(92 назв.)
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