Электронно-лучевая технология в изготовлении микроэлектронных приборов / Дж.Р. Брюэр и др. ; Под ред. Дж.Р. Брюэра ; Пер. с. англ. Ф.П. Пресса.
Material type:
TextLanguage: Russian Original language: English Publication details: Москва : Радио и связь, 1984.Description: 336 с. : илSubject(s):
| Item type | Current library | Collection | Call number | Status | Notes | Barcode | |
|---|---|---|---|---|---|---|---|
Գրքեր / Books
|
Fundamental Scientific Library | General | PII/523022 (Browse shelf(Opens below)) | Available | 30 Days Loan | FL0185198 | |
|
Գրքեր / Books
|
Fundamental Scientific Library | General | PII/528778 (Browse shelf(Opens below)) | Available | 30 Days Loan | FL0174043 |
Библиогр.: с. 316 - 328.
Оригинал на англ. : Electron-Beam technology in Microelectronic Fabrication / Edited by George R. Brewer - New York : Academic Press : 1980
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