(NfOTOREZISTORY (B- (NDIFFUZANTY W POLUPROWODNIKOWOJ TEHNOLOGII (B/s - (NgUK(B, (Ne(B.(Ng(B.s; (NeLXCOW(B, (NaNDREJ wASILXEWI^s; (N{UMAN(B, (NwALENTINA bORISOWNAs; (N`RRE(B, (NtATXQNA aNDREEWNAs; (NeLXCOW(B, (Na(B.(Nw(B.s; (NfIZIKO(B-(NTEHNI^ESKIJ IN(B-(NT IM(B. (Na(B.(Nf(B. (NiOFFEs ((NlENINGRAD (B:s (NnAUKA(B, (NlENINGR(B. (NOTD(B-(NNIE(B,s, 1984)
Keywords: (NpOLUPROWODNIKIs