(NfUNDAMENTALXNYE WOPROSY IONNOJ IMPLANTACII (B:s ((NmATERIALY (B3-(NJ WSESO@ZNOJ [KOLY (B17-23 (NI@NQ (B1985 (NG(B., (NaLMA(B-(NaTA (B) /s - (NdOBROTIN(B, (Nn(B.(Na(B.s; (NiNSTITUT FIZIKI WYSOKIH \NERGIJ an kAZssrs; (NwSESO@ZNAQ [KOLA(B(3) (NaLMA(B-(NaTA (B17-23 (NI@NQ (B1985s ((NaLMA(B-(NaTA (B:s (NnAUKA(B. (NkAZssr(B,s, 1987)
Keywords: (NiONNAQ IMPLANTACIQs