(NfIZIKA SUBMIKRONNOJ LITOGRAFII (B/s - (NwALIEW(B, (NkAMILX aHMETOWI^s ((NmOSKWA (B:s (NnAUKA(B,s, 1990)
(NbIBLIOGR(B. (NW KONCE GLAWs
Keywords: (NmIKROLITOGRAFIQs