(NwOLOKONNO(B-(NOPTI^ESKIE PRIBORY I SISTEMY (B: s (NnAU^NYE RAZRABOTKI ntc (B"(NnANOTEHNOLOGII WOLOKONNO(B-(NOPTI^ESKIH SISTEM(B" (NpENZENSKOGO GOS(B. (NUN(B-(NTA (B/ s - (NmURA[KINA(B, (NtATXQNA iWANOWNA s; (NbADEEWA(B, (Ne(B.(Na(B. s ((NsANKT(B-(NpETERBURG (B: s (NpOLITEHNIKA(B, s, 2018)
(N~(B. 1 (2018 : 186, [5] (NS(B. : (NIL(B., (NPORTR(B., (NTABL(B.)s
Keywords: (NoPTI^ESKIE PRIBORYs; (NoPTI^ESKIE SISTEMYs