(NoSNOWY FOTOLITOGRAFII W PROIZWODSTWE INTEGRALXNYH SHEM (B/s - (NmALIN(B, (Nb(B,(Nw(B.s; (N|REZ(B, (Nt(B.(Ni(B.s ((NmOSKWA (B:s (NiZD(B-(NWO cnii (B"(N|LEKTRONIKA(B",s, 1973)
(NbIBLIOGR(B.: (NS(B. 35-38s
Keywords: (N|LEKTROTEHNIKAs