(NdEFEKTY STRUKTURY W IONNO(B-(NIMPLANTIROWANNOM KREMNII (B/s - (NkOMAROW(B, (NfADEJ fADEEWI^s; (NnOWIKOW(B, (Na(B.(Np(B.s; (N{IRQEW(B, (Ns(B.(N`(B.s; (NsOLOWXEW(B, (Nw(B.(Ns(B.s ((NmINSK (B:s (NuNIWERSITETSKOE(B,s, 1990)
(NbIBLIOGR(B.: (NS(B. 293-318s
Keywords: (NkREMNIJs -- (NdEFEKTYs