Физические основы субмикронной литографии в микроэлектронике / К.А. Валиев, А.В. Раков.
Material type:
TextLanguage: Russian Publication details: Москва : Радио и связь, 1984.Description: 350 с. : ил. 32, табл. 27Subject(s):
| Item type | Current library | Collection | Call number | Status | Notes | Barcode | |
|---|---|---|---|---|---|---|---|
Գրքեր / Books
|
Fundamental Scientific Library | General | PII/528205 (Browse shelf(Opens below)) | Available | 30 Days Loan | FL0175787 | |
|
Գրքեր / Books
|
Fundamental Scientific Library | General | PII/528913 (Browse shelf(Opens below)) | Available | 30 Days Loan | FL0173963 |
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