Основы фотолитографии в производстве интегральных схем / Б.М. Малин, Т.И. Эрез; М-во электронной промышленности СССР.
Material type:
TextLanguage: Russian Series: Обзоры по электронной технике | Микроэлектроника ; 2(86)Publication details: Москва : Изд-во ЦНИИ "Электроника", 1973.Description: 39 с. : илSubject(s):
| Item type | Current library | Collection | Call number | Status | Notes | Barcode | |
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Գրքեր / Books
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Fundamental Scientific Library | General | PII/312555 (Browse shelf(Opens below)) | Available | 30 Days Loan | FL0214835 |
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Библиогр.: с. 35-38
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