Высокоразрешающая неорганическая фотолитография / И. М. Гранкин, А. В. Коломейко, В. П. Погребняк.
Material type:
Item type | Current library | Collection | Call number | Status | Notes | Barcode | |
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Fundamental Scientific Library | General | PII/511893 (Browse shelf(Opens below)) | Available | 30 Days Loan | FL0210457 |
Библиогр.: с. 49-52
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