Дефекты структуры в ионно-имплантированном кремнии / Ф.Ф. Комаров, А.П. Новиков, В.С. Соловьев, С.Ю. Ширяев.
Material type:
- 5785501929
Item type | Current library | Collection | Call number | Status | Notes | Barcode | |
---|---|---|---|---|---|---|---|
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Fundamental Scientific Library | General | PII/621619 (Browse shelf(Opens below)) | Available | 30 Days Loan | 120621619 |
Библиогр.: с. 293-318
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