Обработка монокристаллов в микроэлектронике / В.И. Карбань, Ю.И. Борзаков.
Material type:
Item type | Current library | Collection | Call number | Status | Notes | Barcode | |
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Fundamental Scientific Library | General | РII/589562 (Browse shelf(Opens below)) | Available | 30 Days Loan | FL0053030 |
Библиогр.: с. 96-102
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