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Физика субмикронной литографии /

Валиев, Камиль Ахметович

Физика субмикронной литографии / К.А. Валиев. - Москва : Наука, 1990. - 527,[ 1] с.

Библиогр. в конце глав

ISBN: 5020143812

Subjects--Topical Terms:
Микролитография

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